Sensitivity of Micro Cantilever Mass Sensor Transduced by PZT Film
نویسندگان
چکیده
منابع مشابه
Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
Fabrice F.C. Duval a,∗, Stephen A. Wilson a, Graham Ensell b, Nicolas M.P. Evanno c, Markys G. Cain d, Roger W. Whatmore a,1 a School of Industrial and Manufacturing Science, Cranfield University, Bedfordshire MK43 0AL, UK b INNOS Limited, Mountbatten Building, Highfield, Southampton, Hampshire SO17 1BJ, UK c Rolls-Royce Plc, Strategic Research Centre, Sina-28, P.O. Box 31, Derby DE24 8BJ, UK d...
متن کاملPZT Thin-Film Meso- and Micro Devices
This paper consists of three major topics. The first topic is a review of challenges encountered in PZT thin film fabrication. Currently, sol-gel processing is one of the most promising techniques to fabricate PZT thin films. There are, however, several major challenges, including crack formation, thermally unstable electrodes, and poor piezoelectric properties. The second topic reveals some in...
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Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian, 116024, China Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, 116024, China College of Electronic Science and Technology, Dalian University of Technology, Dalian, 116024, China Cranfield Univer...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2007
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.127.126